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Ion currents to cylindrical Langmuir probes in RF plasmas
Annaratone, B M, Allen, M W, Allen, J EVolume:
25
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/25/3/012
Date:
March, 1992
File:
PDF, 502 KB
english, 1992