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[IEEE 2002 IEEE International Reliability Physics Symposium Proceedings. 40th Annual - Dallas, TX, USA (7-11 April 2002)] 2002 IEEE International Reliability Physics Symposium. Proceedings. 40th Annual (Cat. No.02CH37320) - Recovery of open via after electromigration in Cu dual Damascene interconnect
Yinghua Sun,, Peng Zhou,, Dae-Yong Kim,, Goodson, K.E., Wong, S.S.Year:
2002
Language:
english
DOI:
10.1109/relphy.2002.996683
File:
PDF, 149 KB
english, 2002