Tribological modification of aluminum by electron-cyclotron...

Tribological modification of aluminum by electron-cyclotron resonance plasma source ion implantation

Popovici, D., Bolduc, M., Terreault, B., Sarkissian, A. H., Stansfield, B. L., Paynter, R. W., Bourgoin, D.

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Volume:

Year:

1999

Language:

english

Journal:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

DOI:

10.1116/1.581717

File:

PDF, 383 KB

english, 1999

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