[IEEE 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT) - Beijing, China (2008.10.20-2008.10.23)] 2008 9th International Conference on Solid-State and Integrated-Circuit Technology - In-situ boron-doped low-stress LPCVD polysilicon for micromechanical disk resonator
Yunfei Liu,, Jing Xie,, Jinling Yang,, Longjuan Tang,, Fuhua Yang,Year:
2008
Language:
english
DOI:
10.1109/icsict.2008.4735073
File:
PDF, 1.36 MB
english, 2008