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[IEEE 2008 International Conference on Smart Manufacturing application (ICSMA) - Goyang-si, South Korea (2008.04.9-2008.04.11)] 2008 International Conference on Smart Manufacturing Application - FIB-Sputtering Characteristic of Mold Material and Nano Grid Pattern Fabrication
Kang, Eun-Goo, Choi, Byeong-Yeol, Hong, Won-Pyo, Choi, Hon-Zong, Lee, Seok-WooYear:
2008
Language:
english
DOI:
10.1109/icsma.2008.4505599
File:
PDF, 1.66 MB
english, 2008