Negative-type extreme ultraviolet Resist Materials based on...

Japanese Journal of Applied Physics 2010 / 6 Vol. 49; Iss. 6

Negative-type extreme ultraviolet Resist Materials based on Water-Wheel-like Cyclic Oligomer (Noria)

Seki, Hiroyuki, Kato, Yuki, Kudo, Hiroto, Oizumi, Hiroaki, Itani, Toshiro, Nishikubo, Tadatomi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.06GF06
Date:
June, 2010
File:
PDF, 277 KB
english, 2010
Conversion to is in progress
Conversion to is failed