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[IEEE 30th Annual Proceedings Reliability Physics 1992 - San Diego, CA, USA (1992.03.31-1992.04.2)] 30th Annual Proceedings Reliability Physics 1992 - Analysis of silicide process defects by non-contact electron-beam charging
Jenkins, K.A., Agnello, P.D., Bucelot, T.J.Year:
1992
DOI:
10.1109/relphy.1992.187661
File:
PDF, 454 KB
1992