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[IEEE The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. - Traverse City, MI, USA (2006.06.4-2006.06.8)] The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. - Spatially-resolved oes measurement of inductively-coupled plasmas in E and H modes
Yu Chen,, Zhi-Gang Guo,, Yi-Kang Pu,Year:
2006
Language:
english
DOI:
10.1109/plasma.2006.1707121
File:
PDF, 138 KB
english, 2006