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[IEEE 2008 IEEE Sensors - Lecce, Italy (2008.10.26-2008.10.29)] 2008 IEEE Sensors - Anisotropic etching of silicon in alkaline solutions : Microscopic activation energy calculations for silicon atoms and its simulation applications
Zai-Fa Zhou,, Qing-An Huang,, Wei-Hua Li,Year:
2008
Language:
english
DOI:
10.1109/icsens.2008.4716479
File:
PDF, 444 KB
english, 2008