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[IEEE International Conference on Plasma Science (papers in summary form only received) - Madison, WI, USA (1995.06.5-1995.06.8)] International Conference on Plasma Science (papers in summary form only received) - An RF sheath model for high plasma density equipment simulations
Grapperhaus, M.J., Kushner, M.J.Year:
1995
Language:
english
DOI:
10.1109/plasma.1995.533250
File:
PDF, 99 KB
english, 1995