[IEEE 2012 Photonics Global Conference (PGC) - Singapore, Singapore (2012.12.13-2012.12.16)] 2012 Photonics Global Conference (PGC) - Plasma activation assisted low-temperature direct wafer bonding
Hongyao Chua,, Xianshu Luo,, Wai Hong See Toh,, Junfeng Song,, Tsung-Yang Liow,, Mingbin Yu,, Guo-Qiang Lo,Year:
2012
Language:
english
DOI:
10.1109/pgc.2012.6457954
File:
PDF, 669 KB
english, 2012