[IEEE 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Miami Beach, FL, USA (Jan. 30 - Feb. 3, 2005)] 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - SU-8 lift-off patterned silicone chemical vapor sensor arrays
Wong, V.T.S., Huang, A., Chih-Ming Ho,Year:
2005
Language:
english
DOI:
10.1109/memsys.2005.1454039
File:
PDF, 813 KB
english, 2005