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Thermodynamic Study of the Growth Rate of Epitaxial GaAs by GaAs/AsCl 3 /H 2 System
Seki, Hisashi, Moriyama, Kooichi, Matumoto, Shyungo, Uramoto, MasayoshiVolume:
6
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.6.785
Date:
June, 1967
File:
PDF, 158 KB
1967