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[IEEE 2006 IEEE International Symposium on Industrial Electronics - Montreal, Que. (2006.07.9-2006.07.13)] 2006 IEEE International Symposium on Industrial Electronics - Design and Implementation of an Intelligent Manufacturing Execution System for Semiconductor Manufacturing Industry
Chen, Ruey-shun, Tsai, Yung-shun, Chang, Chan-chineYear:
2006
Language:
english
DOI:
10.1109/isie.2006.296085
File:
PDF, 6.56 MB
english, 2006