![](/img/cover-not-exists.png)
[IEEE 2008 58th Electronic Components and Technology Conference (ECTC 2008) - Lake Buena Vista, FL, USA (2008.05.27-2008.05.30)] 2008 58th Electronic Components and Technology Conference - A study on chip thinning process for ultra thin memory devices
Shinya Takyu,, Junya Sagara,, Tetsuya Kurosawa,Year:
2008
Language:
english
DOI:
10.1109/ectc.2008.4550176
File:
PDF, 853 KB
english, 2008