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[IEEE 2012 International Semiconductor Conference Dresden-Grenoble (ISCDG) - formerly known as the Semiconductor Conference Dresden (SCD) - Grenoble, France (2012.09.24-2012.09.26)] 2012 International Semiconductor Conference Dresden-Grenoble (ISCDG) - Effect of different PDAs and a PMA on the electrical performance of TiN/ZAZ/TiN MIM capacitors
Weinreich, W., Seidel, K., Sundqvist, J., Czernohorsky, M., Kucher, P.Year:
2012
Language:
english
DOI:
10.1109/iscdg.2012.6360010
File:
PDF, 1.09 MB
english, 2012