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[IEEE 2013 IEEE 40th International Conference on Plasma Sciences (ICOPS) - San Francisco, CA, USA (2013.06.16-2013.06.21)] 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) - Control of electron energy distributions in inductively coupled plasmas using tandem sources
Logue, Michael D., Kushner, Mark J., Zhu, Weiye, Shin, Hyungjoo, Liu, Lei, Sridhar, Shyam, Donnelly, Vincent M., Economou, Demetre J.Year:
2013
Language:
english
DOI:
10.1109/plasma.2013.6634887
File:
PDF, 102 KB
english, 2013