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[IEEE 2012 IEEE Sensors - Taipei, Taiwan (2012.10.28-2012.10.31)] 2012 IEEE Sensors - 3-Dimensional and damage-free neutral beam etching for MEMS applications

Wada, Akira, Kubota, Tomohiro, Yanagisawa, Yuuki, Altansukh, Batnasan, Samukawa, Seiji, Ono, Tatahito, Miwa, Kazuhiro
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Year:
2012
Language:
english
DOI:
10.1109/icsens.2012.6411442
File:
PDF, 872 KB
english, 2012
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