![](/img/cover-not-exists.png)
[IEEE ICVC'99. 6th International Conference on VLSI and CAD - Seoul, South Korea (26-27 Oct. 1999)] ICVC '99. 6th International Conference on VLSI and CAD (Cat. No.99EX361) - Growth of RuO/sub x/ thin films by metalorganic chemical vapor deposition
Younsoo Kim,, Kyung-Cheol Jeong,, Jae-Hyun Joo,, Jong-Burn Park,, Jun-Sik Lee,, Jong-Woo Yoon,, Jae-Sung Roh,Year:
1999
Language:
english
DOI:
10.1109/icvc.1999.820985
File:
PDF, 173 KB
english, 1999