![](/img/cover-not-exists.png)
[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Mechanical cell lysis chip with ultra-sharp nano-blade array fabricated by crystalline wet etching of (110) silicon
Yun, Sung-Sik, Yoon, Sang Youl, Lee, Jong-Hyun, Yang, SungYear:
2010
Language:
english
DOI:
10.1109/memsys.2010.5442493
File:
PDF, 1.26 MB
english, 2010