High-Performance Single-Crystal-Like Nanowire Poly-Si TFTs With Spacer Patterning Technique
Kang, Tsung-Kuei, Liao, Ta-Chuan, Lin, Chia-Min, Liu, Han-Wen, Cheng, Huang-ChungVolume:
32
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2010.2099198
Date:
March, 2011
File:
PDF, 448 KB
english, 2011