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[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Micro-cantilevers for non-destructive characterization of nanograss uniformity
Petersen, Dirch H., Wang, Fei, Olesen, Mikkel B., Wierzbicki, Rafal, Schmidt, Michael S., Nielsen, Peter F., Boggild, Peter, Hansen, Ole, Molhave, KristianYear:
2011
Language:
english
DOI:
10.1109/transducers.2011.5969173
File:
PDF, 3.41 MB
english, 2011