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MEMS lubricants based on bound and mobile phases of hydrocarbon compounds: film deposition and performance evaluation
Eapen, K.C., Patton, S.T., Smallwood, S.A., Phillips, B.S., Zabinski, J.S.Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.851806
Date:
October, 2005
File:
PDF, 979 KB
english, 2005