[IEEE 2014 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2014.5.19-2014.5.21)] 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) - Rethinking the approach to higher 450mm process gas flows: A case study
Corbin, Bill, Pierce, Adrienne, Bailey, ChrisYear:
2014
Language:
english
DOI:
10.1109/asmc.2014.6847000
File:
PDF, 428 KB
english, 2014