[IEEE Proceedings. SOS/SOI Technology Workshop - St. Simons Island, GA, USA (3-5 Oct. 1988)] Proceedings. SOS/SOI Technology Workshop - Silicon on SiO/sub 2/ by two step thermal bonding (TSTB) process
Xu Xiao-Li,, Zhan Juan,, Tong Qin-Yi,Year:
1988
Language:
english
DOI:
10.1109/soi.1988.95406
File:
PDF, 114 KB
english, 1988