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[IEEE 2010 IEEE International Frequency Control Symposium (FCS) - Newport Beach, CA, USA (2010.06.1-2010.06.4)] 2010 IEEE International Frequency Control Symposium - Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators
Jaakkola, Antti, Lamy, Jerome, Dekker, James, Pensala, Tuomas, Lipiainen, Lauri, Kokkonen, KimmoYear:
2010
Language:
english
DOI:
10.1109/freq.2010.5556299
File:
PDF, 1.58 MB
english, 2010