![](/img/cover-not-exists.png)
[IEEE International Electron Devices Meeting 1998. Technical Digest - San Francisco, CA, USA (6-9 Dec. 1998)] International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) - Novel thermal microactuator based on CVD-diamond films
Gluche, P., Leuner, R., Kohn, E., Rembe, C., Aus der Wiesche, S., Hofer, E.P.Year:
1998
Language:
english
DOI:
10.1109/iedm.1998.746403
File:
PDF, 834 KB
english, 1998