[IEEE 7th International Conference on Solid-State and...

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[IEEE 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Beijing, China (Oct. 18-21, 2004)] Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Design and fabrication of a torsional Z-axis capacitive accelerometer with novel comb capacitor

Zhenchuan Yang,, Guizhen Yan,, Yilong Hao,, Guoying Wu,
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Volume:
3
Year:
2004
Language:
english
DOI:
10.1109/icsict.2004.1435181
File:
PDF, 778 KB
english, 2004
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