[IEEE 2010 IEEE 3rd International Nanoelectronics Conference (INEC) - Hong Kong, China (2010.01.3-2010.01.8)] 2010 3rd International Nanoelectronics Conference (INEC) - Growth and characterization of Ni3FeN thin films by reactive gas timing RF magnetron sputtering
Techitdheera, Wicharn, Thassana, Chewa, Pecharapa, Wisanu, Nukaew, JitiYear:
2010
Language:
english
DOI:
10.1109/inec.2010.5424982
File:
PDF, 279 KB
english, 2010