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Elimination of nanovoids induced during electroforming of metallic nanostamps with high-aspect-ratio nanostructures by the pulse reverse current electroforming process
Han, Jungjin, Han, Jeongwon, Lee, Byung Soo, Lim, Jiseok, Kim, Seok-min, Kim, Hansung, Kang, ShinillVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/6/065004
Date:
June, 2012
File:
PDF, 1.65 MB
english, 2012