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[IEEE 2008 International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM) - Smolenice, Slovakia (2008.10.12-2008.10.16)] 2008 International Conference on Advanced Semiconductor Devices and Microsystems - PECVD Silicon Carbon Nitrid Thin Films: Properties
Bohacek, P., Huran, J., Kobzev, A.P., Balalykin, N.I., Pezoltd, J.Year:
2008
Language:
english
DOI:
10.1109/asdam.2008.4743340
File:
PDF, 185 KB
english, 2008