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[IEEE 2006 SICE-ICASE International Joint Conference - Busan Exhibition & Convention Center-BEXCO, Busan, Korea (2006.10.18-2006.10.21)] 2006 SICE-ICASE International Joint Conference - Design of a Hot Plate with Rapid Cooling Capability for Thermal Nanoimprint Lithography
Kwak, Ho, Park, Gyu, Son, Byoung, Lee, Jae, Park, HeeYear:
2006
Language:
english
DOI:
10.1109/sice.2006.314808
File:
PDF, 5.41 MB
english, 2006