[IEEE 2010 IEEE International Conference on Mechatronics and Automation (ICMA) - Xi'an, China (2010.08.4-2010.08.7)] 2010 IEEE International Conference on Mechatronics and Automation - Measurement of nanoscale surface patterns produced by two-beam laser interference lithography
Pan, Haiyan, Liu, Lanjiao, Xu, Jia, Xu, Hongmei, Song, Zhengxun, Weng, Zhankun, Hu, Zhen, Zhang, Jin, Yue, Yong, Li, Dayou, Wang, ZuobinYear:
2010
Language:
english
DOI:
10.1109/icma.2010.5588724
File:
PDF, 3.07 MB
english, 2010