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[IEEE 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT) - Beijing, China (2008.10.20-2008.10.23)] 2008 9th International Conference on Solid-State and Integrated-Circuit Technology - UV-LIGA metal MEMS: A promising tool to serve IC industry
Gu, Lei, Zhengzheng Wu,, Wang, Fei, Rong Cheng,, Kewei Jiang,, Xinxin Li,Year:
2008
Language:
english
DOI:
10.1109/icsict.2008.4735052
File:
PDF, 4.17 MB
english, 2008