Basic investigations on a piezoelectric bending actuator for micro-electro-mechanical applications
Kueppers, H., Hoffmann, M., Leuerer, T., Schneller, T., Boettger, U., Waser, R., Mokwa, W., Schnakenberg, U.Volume:
35
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580108016908
Date:
February, 2001
File:
PDF, 823 KB
english, 2001