[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - Pre-clean synergy with poly EMP process
Wooi-Cheang Goh,, Yan Chen,, Yan-Zheng Peck,, Won-Gyu Park,, Kah-Keen Lai,Year:
2013
Language:
english
DOI:
10.1109/asmc.2013.6552820
File:
PDF, 419 KB
english, 2013