![](/img/cover-not-exists.png)
Focused ion beam applications to solid state devices
Matsui, Shinji, Ochiai, YukinoriVolume:
7
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/7/3/013
Date:
September, 1996
File:
PDF, 843 KB
english, 1996