Focused ion beam applications to solid state devices

Focused ion beam applications to solid state devices

Matsui, Shinji, Ochiai, Yukinori
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Volume:
7
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/7/3/013
Date:
September, 1996
File:
PDF, 843 KB
english, 1996
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