[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Quality factor enhancement in micromechanical resonators at cryogenic temperatures
Li, Wei-Chang, Lin, Yang, Kim, Bongsang, Ren, Zeying, Nguyen, Clark T.-C.Year:
2009
Language:
english
DOI:
10.1109/sensor.2009.5285815
File:
PDF, 15.81 MB
english, 2009