[IEEE IEEE Sensors, 2004. - Vienna, Austria (Oct. 24 - 27, 2004)] Proceedings of IEEE Sensors, 2004. - CMOS compatible 3-D self assembled microstructures using thin film SOI technology
Iker, F., Si Moussa, M., Andre, N., Pardoen, T., Raskin, J.-P.Year:
2004
Language:
english
DOI:
10.1109/icsens.2004.1426371
File:
PDF, 1.16 MB
english, 2004