![](/img/cover-not-exists.png)
[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Wafer-level fabricated micro beam splitter based on 45-degree saw dicing of glass substrate
Bargiel, S., Baranski, M., Passilly, N., Guichardaz, B., Herth, E., Gorecki, C., Jia, C., Fromel, J., Wiemer, M.Year:
2013
Language:
english
DOI:
10.1109/transducers.2013.6626821
File:
PDF, 1.32 MB
english, 2013