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[IEEE 2011 IEEE Sensors - Limerick, Ireland (2011.10.28-2011.10.31)] 2011 IEEE SENSORS Proceedings - A surface-micromachined MEMS acoustic sensor with back-plate anchors of 100 µm depth
Lee, Jaewoo, Je, C.H., Jeon, J.H., Yang, W.S., Kim, JongdaeYear:
2011
Language:
english
DOI:
10.1109/icsens.2011.6127081
File:
PDF, 1.98 MB
english, 2011