[IEEE 2008 IEEE Sensors - Lecce, Italy (2008.10.26-2008.10.29)] 2008 IEEE Sensors - Performance of miniaturized LPCVD-SiN-membrane-based 7–14 μm infrared thermal detector: Analytical, modeling, and experimental study
Wicaksono, Dedy H.B., Pandraud, Gregory, French, Patrick J., Jutzi, FabioYear:
2008
Language:
english
DOI:
10.1109/icsens.2008.4716486
File:
PDF, 584 KB
english, 2008