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[IEEE 1995 Conference on Electrical Insulation and Dielectric Phenomena - Virginia Beach, VA, USA (22-25 Oct. 1995)] Proceedings of 1995 Conference on Electrical Insulation and Dielectric Phenomena - Simulation of three-dimensional stop-ion and deposited energy distributions in amorphous chalcogenide resist film by Ga ion exposure
Hyun-Yong Lee,, Hong-Bay Chung,Year:
1995
Language:
english
DOI:
10.1109/ceidp.1995.483790
File:
PDF, 374 KB
english, 1995