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[IEEE 2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR) - Kyoto, Japan (2013.06.30-2013.07.4)] 2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR) - Ablation process of PMMA induced by irradiation with laser plasma EUV light
Sugiura, Nobuhiko, Torii, Shuichi, Makimura, Tetsuya, Ichinosawa, Yoshiyuki, Okazaki, Kouta, Nakamura, Daisuke, Takahashi, Akihiko, Okada, Tatsuo, Niino, Hiroyuki, Murakami, KouichiYear:
2013
Language:
english
DOI:
10.1109/cleopr.2013.6600550
File:
PDF, 1.39 MB
english, 2013