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[IEEE 2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Munich, Germany (23-24 April 2001)] 2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (IEEE Cat. No.01CH37160) - Manufacturing optimization of shallow trench isolation for advanced CMOS logic technology
Speranza, T., Yutong Wu,, Fisch, E., Slinkman, J., Wong, J., Beyer, K.Year:
2001
Language:
english
DOI:
10.1109/asmc.2001.925616
File:
PDF, 462 KB
english, 2001