[IEEE 2012 IEEE International Ultrasonics Symposium - Dresden, Germany (2012.10.7-2012.10.10)] 2012 IEEE International Ultrasonics Symposium - Reactive sputtering of highly c-axis textured Ti-doped AlN thin films
Felmetsger, V. V., Mikhov, M. K.Year:
2012
Language:
english
DOI:
10.1109/ultsym.2012.0195
File:
PDF, 1.43 MB
english, 2012