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[IEEE 25th International Conference on Plasma Sciences - Raleigh, NC, USA (1-4 June 1998)] 25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) - Activated nitrogens in ECR-plasma and its effects on growth of cubic GaN
Biao Gu,, Yin Xu,, Fuwen Qin,Year:
1998
Language:
english
DOI:
10.1109/plasma.1998.677652
File:
PDF, 98 KB
english, 1998