[IEEE IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Oiso, Japan (25-28 Jan. 1994)] Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Electrostatic polysilicon microrelays integrated with MOSFETs
Gretillat, M.-A., Thiebaud, P., de Rooij, N.F., Linder, C.Year:
1994
Language:
english
DOI:
10.1109/memsys.1994.555605
File:
PDF, 586 KB
english, 1994