[IEEE 2010 IEEE 3rd International Nanoelectronics Conference (INEC) - Hong Kong, China (2010.01.3-2010.01.8)] 2010 3rd International Nanoelectronics Conference (INEC) - Investigation of inner surface of silicon microchannels fabricated by electrochemical method
Pengliang Ci,, Jing Shi,, Li Sun,, Tao Liu,, Lianwei Wang,, Chu, Paul K.Year:
2010
Language:
english
DOI:
10.1109/inec.2010.5424440
File:
PDF, 434 KB
english, 2010