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[IEEE 2007 17th International Crimean Conference - Microwave & Telecommunication Technology - Sevastopol, Ukraine (2007.09.10-2007.09.14)] 2007 17th International Crimean Conference - Microwave & Telecommunication Technology - Technique for Oxidation Parameters Definition, Based on Investigation of Defects Formation Images in Silicon Inversion MOS - Structures
Smyntyna, V. A., Kulinich, O. A., Glauberman, M. A., Chemeresyuk, G. G., Yatsunskiy, I. R., Sviridova, O. V.Year:
2007
Language:
russian
DOI:
10.1109/crmico.2007.4368849
File:
PDF, 459 KB
russian, 2007